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Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits : Symposium held April 13-16, 1998, San Francisco, California, U.S.A.: MRS Vol.514 Vol.514 Vol.514
editors, Shyam P. Murarka, Moshe Eizenberg, David B. Fraser [et al.]
Materials Research Society (MRS)
(1998)
UDC: MRS
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