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Plasma surface modification and plasma polymerization
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Chemical vapor deposition of refractory metals and ceramics II : symposium held December 4-6, 1991, Boston, Massachusetts, U.S.A. II
Besmann, Theodore M. Gallois, Bernard M. Warren, James W.
Materials Research Society
(1992)
UDC: 539.23
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Handbook of sputter deposition technology : principles, technology, and applications
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