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Biomicroelectromechanical systems (BioMEMS) : symposium held April 22-25, 2003, San Francisco, California, U.S.A.
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Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A.
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Micro- and nanosystems - materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
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