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薄膜作製応用ハンドブック
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薄膜ハンドブック
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Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis
Cuomo, J. J. Rossnagel, Stephen M. Kaufman, Harold R.
edited by Jerome J. Cuomo, Stephen M. Rossnagel, Harold R. Kaufman
Noyes Publications
(1989)
UDC: 539.23
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