[M] TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

著者: Mitsuishi Kazutaka Takeguchi M Shimojo M Tanaka M Furuya K (出版日: 2007)
https://hdl.handle.net/20.500.11932/143968

資料: TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

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作成時刻: 2025/07/14 15:01:33

更新時刻: 2025/07/14 15:46:28