[M] TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

Creator: Mitsuishi Kazutaka Takeguchi M Shimojo M Tanaka M Furuya K (Date of publication: 2007)
https://hdl.handle.net/20.500.11932/143968

Manifestation: TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors

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Created at: Mon, 14 Jul 2025 15:01:33 +0900

Updated at: Mon, 14 Jul 2025 15:46:28 +0900