[M] Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998

editors, Marc Heyns, Marc Meuris and Paul Mertens
Creator: Heyns, Marc Meuris, Marc Mertens, Paul Publisher: Scitec Publications Ltd (Date of publication: 1999)

Manifestation: Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998

Shelf: Journal Archives 8 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 548.526|D|10794

Register number:

Item identifier: 218003

Include supplements: No

Required role: Guest

Acquired at: June 10, 1999

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Accepted at:

Created at: Wed, 15 Dec 2010 23:14:40 +0900

Updated at: Mon, 15 Dec 2025 09:52:44 +0900