[M] Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

editors, Arthur H. Heuer, S. Jushua Jacobs
Creator: Heuer, A. H. (Arthur Harold) Jacobs, S. Joshua Publisher: Materials Research Society (Date of publication: 1999)

Manifestation: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

Shelf: Other (Sengen)

Checkout type: 標準

Circulation status: Removed

Call number: MRS|P|11068

Register number:

Item identifier: 218328

Include supplements: No

Required role: Guest

Acquired at: June 12, 2000

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Accepted at:

Created at: Wed, 15 Dec 2010 23:37:03 +0900

Updated at: Mon, 12 May 2025 09:55:08 +0900