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Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A. Heuer, A. H. (Arthur Harold) Jacobs, S. Joshua Materials Research Society (1999) UDC: MRS Item identifier Library Shelf Call number Circulation status 602553 Namiki Books 27 681|H| Available On Shelf

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