[M] Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

editors, Arturo A. Ayón ... [et al.]
Creator: Materials Research Society Ayón, Arturo A. Buchheit, Thomas E. Kahn, Harold Spearing, S. Mark Publisher: Materials Research Society (Date of publication: 2002)

Manifestation: Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|687

Register number:

Item identifier: 219241

Include supplements: No

Required role: Guest

Acquired at: July 31, 2002

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:45:13 +0900

Updated at: Wed, 03 Dec 2025 16:34:45 +0900