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Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989 v. 2
edited by K. Sumino
Creator: International Conference on the Science and Technology of Defect Control in Semiconductors 角野, 浩二 Publisher: North-Holland Distributors for the U.S. and Canada, Elsevier Science Pub. (Date of publication: 1990)
Checkout type: 標準
Circulation status: Available On Shelf
Call number: 621.315|S|2
Register number: N00119
Item identifier: 600119
Include supplements: No
Required role: Guest
Acquired at: July 01, 2013
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Created at: Mon, 08 Jul 2013 13:31:40 +0900
Updated at: Mon, 15 Dec 2025 09:43:45 +0900