[M] Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

editors, Arthur H. Heuer, S. Jushua Jacobs
Creator: Heuer, A. H. (Arthur Harold) Jacobs, S. Joshua Publisher: Materials Research Society (Date of publication: 1999)

Manifestation: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

Shelf: Books 27 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 681|H|

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Item identifier: 602553

Include supplements: No

Required role: Guest

Acquired at: March 15, 2023

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Created at: Sun, 26 Mar 2023 11:44:35 +0900

Updated at: Mon, 15 Dec 2025 09:49:05 +0900