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TEM characterization of microstructure and composition of nanostructures formed by electron beam induced deposition with tetrakis(trifluorophoshite)- metal precursors 
Creator: Mitsuishi Kazutaka Takeguchi M Shimojo M Tanaka M Furuya K
(Date of publication: 2007)
https://hdl.handle.net/20.500.11932/143968 
| Collection: | NIMS成果物 |
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Online resource
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| Language: | unknown |
| Physical description: | 2 p. (176 - 177) |
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| Identifier: | Handle URI: https://hdl.handle.net/20.500.11932/143968 |
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