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Handbook of chemical vapor deposition (CVD) : principles, technology, and applications
by Hugh O. Pierson
Creator: Pierson, Hugh O. Publisher: Noyes Publications
(Date of publication: 1999)
| Edition: | 2nd ed |
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| Language: | English |
| Physical description: | xxiv, 482 p. ; 25 cm |
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ISBN: 9780815514329
NCID: BA50973678
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