Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on ultra clean processing of silicon surfaces held in Ostend, Belgium, September 21-23, 1998

Showing Manifestation

editors, Marc Heyns, Marc Meuris and Paul Mertens
Creator: Heyns, Marc Meuris, Marc Mertens, Paul Publisher: Scitec Publications Ltd (Date of publication: 1999)

Series statement:	Diffusion and defect data : solid state data Pt. B : Solid State Phenomena ; v. 65 & 66 (ISSN: 10120394)
Form:	Volume
Language:	English
Physical description:	xiv, 301 p. ; 25 cm
Subject:
Classification:	UDC: 548.526
Tag:
Identifier:	ISBN: 9783908450405 ISSN: 10120394 NCID: BA46355405
Abstract:
Note:	Volumes 65-66 of Solid State Phenomena, ISSN1012-0394//Includes index

Item identifier	Library	Shelf	Call number	Circulation status
218003	Namiki	Journal Archives 8	548.526\|D\|10794	Available On Shelf

Namiki
Journal Archives 8
Available On Shelf

548.526

10794