[M] Ultra Clean Processing of Silicon Surfaces : Proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS'98), held in Ostend, Belgium, September 21-23,1998 Vols. 65-66 Vols.65-66

Creator: Editors: Marc Heyns, Marc Meuris, Paul Mertens Publisher: Scitec Publications Ltd (Date of publication: 1999)

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Edition:
Number:	Volume number: Vols.65-66
Form:	Volume
Language:	English
Physical description:	301p; 25cm
Subject:
Classification:	UDC: 548.526
Tag:
Identifier:	ISBN: 9783908450405 ISSN: 10120394
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
218003	Sengen	Books 9	548.526|D|10794	Available On Shelf

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