資料の表示
[M] Ion Implantation in Semiconductors and other Materials Series
著者: edited by B.L. Crowder 協力者・編者: edited by B.L. Crowder 出版者: Plenum Press
(出版日: 1973)
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巻号: | 巻: Series |
形態: | 冊子体 |
言語: | English |
ページ数と大きさ: | 657p; 26cm |
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識別子: | ISBN: 9780306307560 |
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注記: |
Proceedings of the Third International Conference on Ion Implantation in Semiconductors and Other Materials, held at the IBM Thomas J.Watson Research Center, Yorktown Heights, New York, December 11-14, 1972 |