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Ion implantation in semiconductors and other materials : [proceedings]
edited by Billy L. Crowder
Creator: International Conference on Ion Implantation in Semiconductors and Other Materials, 3d, Yorktown Heights, N.Y., 1972 Crowder, Billy L. Contributor: edited by B.L. Crowder Publisher: Plenum Press (Date of publication: 1976)
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| Language: | English |
| Physical description: | xii, 657 p. ; 26 cm |
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ISBN: 9780306307560
NCID: BA11291601
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Includes bibliographical references |
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