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Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A. 
editors, Clive Hayzelden, Crispin Hetherington, Frances Ross
Creator: Hayzelden, Clive Hetherington, Crispin Ross, Frances Publisher: Materials Research Society (Date of publication: 1998)
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Volume
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| Language: | English |
| Physical description: | xi, 270 p. ; 24 cm |
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ISBN: 9781558994294
ISSN: 02729172
NCID: BA37860961
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Includes bibliographical references and index |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 217911 | Namiki |
Journal Archives 60 
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MRS|P|523 | Available On Shelf |