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Electron Microscopy of Semiconducting Materials and ULSI Devices : Symposium held April 15-16, 1998, San Francisco, California, U.S.A. ; MRS Vol.523 Vol.523 Vol.523 
Creator: editors: Clive Hayzelden, Crispin Hetherington, Frances Ross Publisher: Materials Research Society (MRS)
(Date of publication: 1998)
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| Number: | Volume number: Vol.523 |
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Volume
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| Language: | English |
| Physical description: | 455p; 24cm |
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| Identifier: | ISBN: 9781558994294 ISSN: 02729172 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 217911 | Sengen |
Proceedings 26 
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MRS|Ｐ|10705 | Available On Shelf |