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Silicon Front-End Technology-Materials Processing and Modelling: Symposium heldApril 13-15, 1998, San Francisco, California, U.S.A. ; MRS Vol.532 Vol.532 Vol.532 
Creator: editors: Nicholas E.B. Cowern, Dale C. Jacobson, Peter B. Griffin [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 1998)
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| Number: | Volume number: Vol.532 |
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Volume
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| Language: | English |
| Physical description: | 228p; 24cm |
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| Identifier: | ISBN: 9781558994386 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 217932 | Sengen |
Proceedings 26 
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MRS|Ｐ|10721 | Available On Shelf |