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Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A. 
editors, Scott T. Dunham, Jeffrey S. Nelson
Creator: Dunham, Scott T. Nelson, Jeffrey Steven Publisher: Materials Research Society (Date of publication: 1998)
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Volume
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| Language: | English |
| Physical description: | ix, 273 p. ; 24 cm |
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ISBN: 9781558993952
NCID: BA38701726
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Includes bibliographical references and index |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 217950 | Namiki |
Journal Archives 60 
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MRS|P|490 | Available On Shelf |