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[M] Semiconductor Process and Device Performance Modelling : Symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A. MRS Vol.490 Vol.490 Vol.490
Creator: editors: Scott T. Dunham Jeffrey S. Nelson Publisher: Materials Research Society (MRS)
(Date of publication: 1998)
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Number: | Volume number: Vol.490 |
Form: | Volume |
Language: | English |
Physical description: | 273p; 24cm |
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Identifier: | ISBN: 9781558993952 |
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Item identifier | Library | Shelf | Call number | Circulation status |
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217950 | Sengen | Proceedings 26 | MRS|P|10740 | Available On Shelf |