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Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. 
editors, Maarten P. de Boer ... [et al.]
Creator: P. de Boer, Maarten Publisher: Materials Research Society (Date of publication: 2000)
| Titlte alternative: | Materials science of microelectromechanical systems (MEMS) devices 2 |
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Volume
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| Language: | English |
| Physical description: | xiii, 314 p. ; 24 cm |
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ISBN: 9781558995130
ISSN: 02729172
NCID: BA49023729
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 218782 | Namiki |
Journal Archives 60 
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MRS|P|605 | Available On Shelf |