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[M] Materials Science of Microelectromechanical Systems (MEMS) Devices Ⅱ: Symposium held november 29-December 1, 1999, Boston, Massachusetts, U.S.A.; MRS Vol.605 Vol.605 Vol.605
Creator: editors, Maarten P. de Boer, Arthur H. Heuer, S. Joshua Jacobs, Eric Peeters Publisher: Materials Research Society (MRS)
(Date of publication: 2000)
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Number: | Volume number: Vol.605 |
Form: | Volume |
Language: | English |
Physical description: | 314p; 24cm |
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Identifier: | ISBN: 9781558995130 ISSN: 02729172 |
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Item identifier | Library | Shelf | Call number | Circulation status |
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218782 | Sengen | Proceedings 26 | MRS|P|11456 | Available On Shelf |