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Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. P. de Boer, Maarten Materials Research Society (2000) UDC: MRS Item identifier Library Shelf Call number Circulation status 218782 Namiki Journal Archives 60 MRS|P|605 Available On Shelf

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