[M] Beam Injection Assessment of Defects in Semiconductors ： Proceedings of The 5th International Workshop (BIADS 98), held in Parkhotel Schloss Wulkow near Berlin, Germany, August・September 1998 Vols.63-64 Vols.63-64

Creator: M. Kittler O. Breitenstein A. Endros [et al. editors] Publisher: Scitec Publications Ltd (Date of publication: 1998)

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Edition:
Number:	Volume number: Vols.63-64
Form:	Volume
Language:	English
Physical description:	537p; 25cm
Subject:
Classification:	UDC: 548.526
Tag:
Identifier:	ISBN: 9783908450399 ISSN: 10120394
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
217984	Sengen	Books 9	548.526|Ｄ|10776	Available On Shelf

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