資料の表示
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Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998 
editors. M. Kittler, O. Breitenstein, A. Endros and W. Schroter
著者: Kittler, M. Breitenstein, O. 出版者: Scitec Publications Ltd. (出版日: 1998)
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冊子体
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| 言語: | English |
| ページ数と大きさ: | xiv, 537 p. ; 25 cm |
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ISBN: 9783908450399
ISSN: 10120394
NCID: BA46349537
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| 注記: |
Volumes 63-64 of Solid State Phenomena, ISSN1012-0394//Includes bibliographies and index |
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