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Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. 
editors, Arturo A. Ayón ... [et al.]
Creator: Materials Research Society Ayón, Arturo A. Buchheit, Thomas E. Kahn, Harold Spearing, S. Mark Publisher: Materials Research Society (Date of publication: 2002)
| Titlte alternative: | Materials science of microelectromechanical systems (MEMS) devices 4//Materials science of microelectromechanical systems (MEMS) devices four |
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Volume
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| Language: | English |
| Physical description: | xi, 318 p. ; 24 cm |
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ISBN: 9781558996236
NCID: BA57659263
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 219241 | Namiki |
Journal Archives 60 
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MRS|P|687 | Available On Shelf |