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Materials Science of Microelectromechanical Systems (MEMS) Devices Ⅳ: Symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.; MRS Vol.687 Vol.687 Vol.687 
Creator: editors, Arturo A. Ayon, Thomas E. Buchheit, Harold Kahn [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2002)
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| Number: | Volume number: Vol.687 |
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Volume
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| Language: | English |
| Physical description: | 318p; 24cm |
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| Identifier: | ISBN: 9781558996236 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 219241 | Sengen |
Proceedings 26 
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MRS|P|11734 | Available On Shelf |