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Gettering and Defect Engineering in Semiconductor Technology GADEST 2001 : Proceedings of the 9th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology, S. Tecla, Italy September 30-October 3, 2001 Vols. 82-84 Vols.82-84 
著者: Editor: V. Raineri, F. Priolo, M. Kittler and H. Richter 出版者: Scitec Publications Ltd
(出版日: 2002-01-01)
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| 巻号: | 巻: Vols.82-84 |
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冊子体
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| 言語: | English |
| ページ数と大きさ: | 823p; 25cm |
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| 識別子: | ISBN: 9783908450641 ISSN: 10120394 |
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