[M] 半導体集積回路用レジスト材料ハンドブック

山岡亜夫監修
Creator: 山岡, 亜夫 Publisher: リアライズ社 (Date of publication: 1996-07)

• Detail

Form:	Volume
Language:	Japanese
Physical description:	6, 293, 9p ; 30cm
Subject:
Classification:	UDC: 620.2
Tag:
Identifier:	ISBN: 9784947655899 NCID: BN1495341X
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
218065	Sengen	Stack 8	620.2|Y|10817	Available On Shelf Not For Loan