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Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. 
editors, Gerfield Zwicker ... [et al.]
Creator: Zwicker, Gerfield Materials Research Society. Spring Meeting Advances and Challenges in Chemical Mechanical Planarization Publisher: Materials Research Society (Date of publication: 2007)
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Volume
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| Language: | English |
| Physical description: | xi, 371 p. ; 24 cm |
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ISBN: 9781558999510
NCID: BA83960649
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"...Symposium C, "Advances and Challenges in Chemical Mechanical Planarization," held April 10-12 at the 2007 MRS Spring Meeting in San Francisco, California."--Pref//Inclueds bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 211018 | Namiki |
Journal Archives 60 
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MRS|P|991 | Available On Shelf |