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Advances and Challenges in Chemical Mechanical Planarization: Symposium held April 10-12, 2007, San Francisco, California, U.S.A.: MRS Vol.991 Vol.991 Vol.991 
Creator: editors, Gerfried Zwicker, Christopher Borst, Laertis Economikos, Ara Philipossian Publisher: Materials Research Society (MRS)
(Date of publication: 2007)
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| Number: | Volume number: Vol.991 |
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Volume
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| Language: | English |
| Physical description: | 371p; 24cm |
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| Identifier: | ISBN: 9781558999510 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 211018 | Sengen |
Proceedings 26 
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MRS|P|12461 | Available On Shelf |