資料の表示
[M]
Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. 
editors, Gerfield Zwicker ... [et al.]
著者: Zwicker, Gerfield Materials Research Society. Spring Meeting Advances and Challenges in Chemical Mechanical Planarization 出版者: Materials Research Society (出版日: 2007)
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冊子体
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| 言語: | English |
| ページ数と大きさ: | xi, 371 p. ; 24 cm |
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ISBN: 9781558999510
NCID: BA83960649
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| 注記: |
"...Symposium C, "Advances and Challenges in Chemical Mechanical Planarization," held April 10-12 at the 2007 MRS Spring Meeting in San Francisco, California."--Pref//Inclueds bibliographical references and indexes |
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