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The chemistry of metal CVD
edited by Toivo T. Kodas and Mark J. Hampden-Smith
Creator: Kodas, Toivo T. (Toivo Tarmo) Hampden-Smith, Mark J. Contributor: edited by Toivo T. Kodas, Mark J. Hampden-Smith Publisher: VCH (Date of publication: 1994)
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| Language: | English |
| Physical description: | xxiv, 530 p. ; 25 cm |
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ISBN: 9783527290710
NCID: BA24145974
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Includes bibliographical references |
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