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[M] Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Serial Volume


Publisher: American Institute of Physics

Titlte alternative J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena
ISSN 0734211X
NCID AA10635106
Holding information

【並木】＜年次:1983-1990＞Vol.1-8

Note

【配架場所】並木 集密書庫27
継続前誌：Journal of vacuum science and technology
継続後誌：Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

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1 Journal of Vacuum Science & Technology B Vol.31 No.1-3 Volume
(2013)
Item identifier Library Shelf Call number Circulation status
134997 Namiki Journal Archives 27 Picture Available On Shelf
Not For Loan
2 Journal of Vacuum Science & Technology B Vol.31 No.4-6 Volume
(2013)
Item identifier Library Shelf Call number Circulation status
134998 Namiki Journal Archives 27 Picture Available On Shelf
Not For Loan
3 Journal of Vacuum Science & Technology B Vol.30 No.1-3 Volume
(2012)
Item identifier Library Shelf Call number Circulation status
134995 Namiki Journal Archives 27 Picture Available On Shelf
Not For Loan
4 Journal of Vacuum Science & Technology B Vol.30 No.4-6 Volume
(2012)
Item identifier Library Shelf Call number Circulation status
134996 Namiki Journal Archives 27 Picture Available On Shelf
Not For Loan
5 Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena 29 1-3 Volume
(2011)
Item identifier Library Shelf Call number Circulation status
134801 Namiki Journal Archives 27 Picture Available On Shelf
Not For Loan
6 Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena 29 4-6 Volume
(2011)
Item identifier Library Shelf Call number Circulation status
134802 Namiki Journal Archives 27 Picture Available On Shelf
Not For Loan
7 Journal of Vacuum Science & Technology B Vol.28 No.4-6 Volume
(2010)
Item identifier Library Shelf Call number Circulation status
134771 Namiki Journal Archives 27 Picture Available On Shelf
Not For Loan
8 Journal of Vacuum Science & Technology B Vol.28 No.1-3 Volume
(2010)
Item identifier Library Shelf Call number Circulation status
134770 Namiki Journal Archives 27 Picture Available On Shelf
Not For Loan

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