[M] Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.

editors, Maarten P. de Boer ... [et al.]
Creator: P. de Boer, Maarten Publisher: Materials Research Society (Date of publication: 2000)

Manifestation: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|605

Register number:

Item identifier: 218782

Include supplements: No

Required role: Guest

Acquired at: March 21, 2001

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:37:10 +0900

Updated at: Wed, 03 Dec 2025 16:34:39 +0900