Showing Manifestation
[M]
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A. 
editors, Arthur H. Heuer, S. Jushua Jacobs
Creator: Heuer, A. H. (Arthur Harold) Jacobs, S. Joshua Publisher: Materials Research Society
| Series statement: |
|
| Form: |
Volume
|
| Language: | English |
| Physical description: | ix, 246 p. ; 24 cm |
| Subject: | |
| Classification: | |
| Tag: |
|
| Identifier: |
ISBN: 9781558994522
NCID: BA44647909
|
| Abstract: | |
| Note: |
Includes bibliographical references and indexes |
|---|
| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 602553 | Namiki |
Books 17 
|
681|H| | Available On Shelf |
| 218328 | Sengen |
Proceedings 26
|
MRS|P|11068 | Available On Shelf |