Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

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editors, Arthur H. Heuer, S. Jushua Jacobs
Creator: Heuer, A. H. (Arthur Harold) Jacobs, S. Joshua Publisher: Materials Research Society (Date of publication: 1999)

Series statement:	Materials Research Society symposium proceedings v. 546
Form:	Volume
Language:	English
Physical description:	ix, 246 p. ; 24 cm
Subject:
Classification:	UDC: MRS
Tag:
Identifier:	ISBN: 9781558994522 NCID: BA44647909
Abstract:
Note:	Includes bibliographical references and indexes

Item identifier	Library	Shelf	Call number	Circulation status
602553	Namiki	Books 27	681\|H\|	Available On Shelf

Namiki
Books 27
Available On Shelf

681