[M] 半導体デバイス界面の汚染・損傷の評価と対策

黒田司, 岩黒弘明著
Creator: 黒田, 司 岩黒, 弘明 Publisher: リアライズ社 (Date of publication: 1992-02)

• Detail

Form:	Volume
Language:	Japanese
Physical description:	222p ; 27cm
Subject:
Classification:	UDC: 621.382
Tag:
Identifier:	ISBN: 9784947655509 NCID: BA39999146
Abstract:
Note:	各章末: 参考文献

Item identifier	Library	Shelf	Call number	Circulation status
529619	Namiki	Books 22	621.382|k|05572	Available On Shelf

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