[M] シリコン結晶欠陥の基礎物性とその評価法

上浦洋一著
Creator: 上浦, 洋一 Publisher: リアライズ社 (Date of publication: 1997-05)

• Detail

Titlte alternative:	Basic properties of defects in silicon and their characterizing technologies
Form:	Volume
Language:	Japanese
Physical description:	6,192,10p ; 30cm
Subject:
Classification:	UDC: 621.382
Tag:
Identifier:	ISBN: 9784947655974 NCID: BA30607688
Abstract:
Note:	参考文献: p179-192

Item identifier	Library	Shelf	Call number	Circulation status
529620	Namiki	Books 22	621.382|U|05573	Available On Shelf

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