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Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Materials Research Society LaVan, David A. Ayón, Arturo A.
Materials Research Society
(2003)
UDC: MRS
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Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.
Materials Research Society Ayón, Arturo A. Buchheit, Thomas E.
Materials Research Society
(2002)
UDC: MRS
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Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
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