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Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A. 
editors, David A. LaVan ... [et al.]
Creator: LaVan, David A. da Silva, Mark G. Spearing, S. Mark Vengallatore, Srikar Publisher: Materials Research Society (Date of publication: 2008)
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Volume
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| Language: | English |
| Physical description: | xi, 325 p. ; 24 cm |
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ISBN: 9781558999909
NCID: BA86491577
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Includes index//Other editors: Mark G. da Silva, S. Mark Spearing, Srikar Vengallatore |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 211101 | Namiki |
Journal Archives 60 
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MRS|P|1052 | Available On Shelf |