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1	シリコン結晶欠陥の基礎物性とその評価法 Basic Properties of Defects in Silicon and Their Characterizing Techniques 上浦 洋一 リアライズ社 (1997) UDC: 621.382 Item identifier Library Shelf Call number Circulation status 529620 Namiki Books 16 621.382|U|05573 Available On Shelf

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