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Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.
Vengallatore, Srikar Bagdahn, Jörg Sheppard, Norman F., Jr.
Materials Research Society
(2009)
UDC: MRS
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Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.
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